Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.

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TextPublication details: Norwich, NY : William Andrew Pub. ; Heidelberg : Springer, c2004.Description: xiv, 518 p. : ill. ; 24 cmISBN:

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Item type	Current library	Collection	Call number	Status	Barcode
eBooks	eBooks eBooks	Medicine/Engineering/Home Economics	621.38152 AND (Browse shelf(Opens below))	Available	BMFL23080356

Includes bibliographical references and index.

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