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Thin film materials technology : sputtering of compound materials /

Wasa, Kiyotaka.

Thin film materials technology : sputtering of compound materials / by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. - Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, c2004. - xiv, 518 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 0815514832 (alk. paper)

LCCN: 2003018016

Subjects--Topical Terms:
Cathode sputtering (Plating process)
Thin films.

LC Class. No.: TS695 / .W38 2004

Dewey Class. No.: 621.38152 AND

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