TY  - BOOK
AU  - Wasa,Kiyotaka
AU  - Kitabatake,Makoto
AU  - Adachi,Hideaki
TI  - Thin film materials technology: sputtering of compound materials 
SN  - 0815514832 (alk. paper)
AV  - TS695 .W38 2004
U1  - 621.38152 AND  22
PY  - 2004///
CY  - Norwich, NY, Heidelberg
PB  - William Andrew Pub., Springer
KW  - Cathode sputtering (Plating process)
KW  - Thin films
N1  - Includes bibliographical references and index
UR  - http://41.59.100.242:80/cgi-bin/koha/opac-retrieve-file.pl?id=e0cd46ccac0e48169b73cbdcf08283aa
ER  -