Wasa, Kiyotaka. <br/><br/>
Thin film materials technology :  sputtering of compound materials / 
by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi. 
 - Norwich, NY :  Heidelberg :  William Andrew Pub. ;  Springer,  c2004. 
 - xiv, 518 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0815514832 (alk. paper) 
<br/><br/><label>LCCN: </label>2003018016 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cathode sputtering (Plating process)<br/>Thin films.
<br/><br/><label>LC Class. No.: </label>TS695  / .W38 2004 
<br/><br/><label>Dewey Class. No.: </label>621.38152 AND